| 摘要 |
PROBLEM TO BE SOLVED: To provide an interference fringe analysis method capable of separating an error generated during fringe scanning surely from interference fringe data. SOLUTION: This method is characterized by including a reference procedure (a) for performing respectively Fourier transform of time characteristics of each brightness on a plurality of points of the interference fringe generated during fringe scanning, and referring to a frequency spectrum of a brightness change on each point; a calculation procedure for performing inverse Fourier transform of a frequency component in a specific range in the frequency spectrum, determining the time characteristic of a specific component of the brightness (b), and determining a change with time of a phase of the specific component based on the time characteristic (c); and an extraction procedure for extracting a component to be measured or a prescribed error component from a space distribution based on the change with time of the space distribution of the phase acquired by executing the calculation procedure relative to each point. COPYRIGHT: (C)2006,JPO&NCIPI
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