| 摘要 |
<P>PROBLEM TO BE SOLVED: To make it possible to detect fine waviness component having high spatial frequency with high precision by means of interferometer for face shape measurement. <P>SOLUTION: An interferometer detecting interference fringes, which are formed by detected light flux (LW) consisting of reflected light generated in a tested face (22a) and a predetermined reference light flux (LR) on a conjugate face (16a) of the aforementioned detected face (22a), is equipped with a regulating means (15A) adjusting intensity balance resulting from diffraction reflection component and mirror reflection component at the aforementioned tested face among the aforementioned tested light flux entering the aforementioned conjugate face in the direction the former is strengthened. In interference fringes at that time, fine waviness component of the tested face (22a) is amplified relatively and reflected comparing with waviness components other than this component. Thus, SN ratio of the fine waviness component is enhanced for this amplified magnitude. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
