| 摘要 |
PROBLEM TO BE SOLVED: To simplify a detection mechanism for a driving of oscillator and variations in resonance frequency and remove the noise component of a current etc. flowing through a parasitic capacitor so as to obtain an improved detection output of the S/N ratio in an oscillation-type transducer which has a fine beam(oscillator) inside a fine vacuum chamber. SOLUTION: The oscillation-type transducer includes a first oscillator unit, which has a first oscillator formed inside the vacuum chamber, made up of a shell and a second oscillator unit which is formed in a shape similar to that of the first oscillator unit and has a second oscillator with a resonance frequency different from the first oscillator. The transducer is constructed so that detects a variation of resonance frequency due to distortion as a variation of capacitance between the oscillator and the shell, oscillates the first and second oscillation units at a resonance frequency in the first oscillator, and detects the difference between electric currents flowing through each capacitors in the first and second oscillator units. COPYRIGHT: (C)2006,JPO&NCIPI
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