发明名称 |
Electron microscope equipped with magnetic microprobe |
摘要 |
There is disclosed an electron microscope equipped with a magnetic microprobe. The microscope can apply a strong electric field to a local area on a specimen made of a magnetic material. The magnetic flux density per unit area of the microprobe is high. The microscope includes a biprism for producing interference between an electron beam transmitted through the specimen and an electron beam passing through a vacuum. The specimen is held to a holder. The microprobe is made of a magnetic material and has a needle-like tip. The microscope further includes a moving mechanism capable of moving the microprobe toward and away from the specimen.
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申请公布号 |
US2005274889(A1) |
申请公布日期 |
2005.12.15 |
申请号 |
US20050134090 |
申请日期 |
2005.05.20 |
申请人 |
JEOL LTD. |
发明人 |
SHINDO DAISUKE;MURAKAMI YASUKAZU;OIKAWA TETSUO;INOUE MASAO |
分类号 |
H01J37/26;(IPC1-7):G21K7/00 |
主分类号 |
H01J37/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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