OXIDE SUPERCONDUCTIVE THIN-FILM, PROCESS FOR PRODUCING THE SAME, AND SUPERCONDUCTING FAULT CURRENT LIMITER

摘要

PROBLEM TO BE SOLVED: To provide a thick oxide superconductive thin film, a process for producing the same, and a superconducting current fault limiter using the oxide superconductive thin film. SOLUTION: In the process for producing the oxide superconductive thin film, an oxide superconductive thin film 13 is deposited on a substrate 10 including a sapphire single crystal substrate 11 so as to have the film thickness exceeding 0.7μm without any crack, by a laser beam vapor deposition method in which the substance 4 scattered from a target 1 by irradiating the target 1 with laser beams 3 is vapor-deposited on the substrate. COPYRIGHT: (C)2006,JPO&NCIPI