Manufacture of x-ray detector, by depositing scintillator layer and cleaning substrate surface by plasma etching prior to application of plastics layer

摘要

The method involves depositing a scintillator layer (3) on the surface of a substrate (2), and applying a plastics layer which at least overlies the portion of the substrate surface surrounding the edge of the scintillator layer. At least part of the substrate surface (O) is cleaned by plasma etching, prior to the application of the plastics layer. The plastics layer comprises polyparaxylylene.