| 摘要 |
PROBLEM TO BE SOLVED: To make a dicing without causing damage to a fine structure and to take out a plurality of diced element together. SOLUTION: In the method for manufacturing an element having a fine structure, a plate-shaped component 10 having a fine structure on a surface is fixed on a chuck 24 by a holding component 26, a substance 36, whose state changes according to temperature variation, is applied on the surface of the holding component 10, the substance is solidified on the surface of the plate-shaped component by cooling the substance 36, the plate-shaped component 10 is diced to a plurality of elements in a state where the substance 36 is solidified, and the separated elements are discharged from the holding component. COPYRIGHT: (C)2006,JPO&NCIPI |
