| 摘要 |
Method and device for sensing stress waves. One embodiment is a method that includes providing a support (20) with at least one mount (14 and 16); attaching a semiconductor element (22) containing a plurality of piezoresistors (24, 26, 28, and 30), each having impedance, to the support; connecting the support to a component by the at least one mount of the support; and sensing impedance of the plurality of piezoresistors.
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