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发明名称
MEMS DEVICES ON A NANOMETER SCALE
摘要
申请公布号
EP1603829(A1)
申请公布日期
2005.12.14
申请号
EP20030709977
申请日期
2003.03.13
申请人
BTG INTERNATIONAL LIMITED
发明人
MONTELIUS, LARS, G.;LING, TORBJORN, G., I.;LITWIN, ANDREJ
分类号
B81B3/00;B81C1/00;H02N1/00;(IPC1-7):B81B3/00
主分类号
B81B3/00
代理机构
代理人
主权项
地址
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