| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an alignment stage apparatus having a small diameter size at the minimum, and to make the thrust of a turntable increased and make high-speed, fast-response and high-accuracy performance exhibited. <P>SOLUTION: A magnetic field magnet 4 of a motor 24 is disposed on the turntable 1. An armature coil 5 of the motor 24 is circumferentially disposed on a plane extending in the radial direction of a holding plate 22 attached to a head 2. An outer ring 12 of a bearing 3, for rotatably supporting the turntable 1 on the head 2, is fixed by the head 2 and the holding plate 22. An inner ring 13 is fixed by the turntable 1 and a holding plate 23. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
