发明名称 Supporting system in exposure apparatus
摘要 Disclosed is a supporting system having a carrying member for carrying a workpiece thereon and a supporting mechanism for supporting the carrying member from a workpiece transfer position to a workpiece processing position, wherein, adjacent the transfer position, the weight of the carrying member and a force to be applied to the carrying member are substantially balanced, and wherein, adjacent the workpiece processing position, the weight of the carrying member and a force to be applied to the carrying member are substantially balanced.
申请公布号 US2005270517(A1) 申请公布日期 2005.12.08
申请号 US20050190189 申请日期 2005.07.27
申请人 CANON KABUSHIKI KAISHA 发明人 KORENAGA NOBUSHIGE
分类号 G12B5/00;G03B27/58;G03F7/20;H01L21/027;H01L21/68;H02N15/00;(IPC1-7):G03B27/58 主分类号 G12B5/00
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