发明名称 |
Intermediate suction support and its utilisation for producing a thin film structure |
摘要 |
The present invention relates to an intermediate suction support. The support has at least one suction surface ( 62 ) intended to receive a first face of at least one substrate comprising an embrittled layer, a film thus being defined between the first face of the substrate and the embrittled layer, the suction surface ( 62 ) of the intermediate support being the face with at least one suction element ( 63 ) comprising suction means provided so that, when the embrittled layer is submitted to a treatment leading to the separation of the film from the rest of the substrate, the film can be recuperated. Application to the production of a thin film structure.
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申请公布号 |
US2005270867(A1) |
申请公布日期 |
2005.12.08 |
申请号 |
US20050191290 |
申请日期 |
2005.07.27 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
JAUSSAUD CLAUDE;BRUEL MICHEL;ASPAR BERNARD |
分类号 |
H01L21/683;H01L21/762;H01L31/0392;H01L31/18;(IPC1-7):A45D42/14 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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