发明名称 Intermediate suction support and its utilisation for producing a thin film structure
摘要 The present invention relates to an intermediate suction support. The support has at least one suction surface ( 62 ) intended to receive a first face of at least one substrate comprising an embrittled layer, a film thus being defined between the first face of the substrate and the embrittled layer, the suction surface ( 62 ) of the intermediate support being the face with at least one suction element ( 63 ) comprising suction means provided so that, when the embrittled layer is submitted to a treatment leading to the separation of the film from the rest of the substrate, the film can be recuperated. Application to the production of a thin film structure.
申请公布号 US2005270867(A1) 申请公布日期 2005.12.08
申请号 US20050191290 申请日期 2005.07.27
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 JAUSSAUD CLAUDE;BRUEL MICHEL;ASPAR BERNARD
分类号 H01L21/683;H01L21/762;H01L31/0392;H01L31/18;(IPC1-7):A45D42/14 主分类号 H01L21/683
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