| 摘要 |
PROBLEM TO BE SOLVED: To accurately acquire information utilized for polarization analysis, while simplifying the configuration of an ellipsometer. SOLUTION: This ellipsometer 1 is equipped with an irradiation part 3 for guiding polarized light to a substrate 9, and a light receiving part 4 for receiving reflected light from the substrate 9. The light receiving part 4 is equipped with an analyzer 41 where the reflected light enters, a detection optical system 42 where light via the analyzer 41 enters, and an optical sensor 431 for receiving light via the detection optical system 42. The ellipsometer 1 determines a rotation angle of the analyzer 41 and the correction intensity in each wavelength of analyzer passing light by correcting the measured intensity of received light based on a reflection amplitude ratio angle of the detection optical system 42, and determines the polarization state in each wavelength of light just before entering the analyzer 41 based on the correction intensity of the analyzer passing light. Resultantly, the information utilized for polarization analysis can be acquired accurately, while simplifying the configuration of the device. COPYRIGHT: (C)2006,JPO&NCIPI
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