发明名称 MULTI-MODE CHARGED PARTICLE BEAM DEVICE
摘要 A charged particle device is provided comprising a charged particle source configured to direct charged particles in the direction of a specimen under examination and an imaging device configured to convert charged particles to an image representing the specimen. The imaging device comprises a detector defining a pixel array. The detector is configured to generate electric charges for individual pixels of the pixel array such that the electric charges collectively define the image. The imaging device is configured such that a portion of the pixel array can be transitioned between a partially masked state and a substantially unmasked state.
申请公布号 WO2005013309(A3) 申请公布日期 2005.12.08
申请号 WO2004US24268 申请日期 2004.07.28
申请人 GATAN, INC.;CHAO, HENRY, SHIH-MING;TREVOR, COLIN, GEOFFREY;MOONEY, PAUL, EDWARD;KRAUS, BERND 发明人 CHAO, HENRY, SHIH-MING;TREVOR, COLIN, GEOFFREY;MOONEY, PAUL, EDWARD;KRAUS, BERND
分类号 G01N23/04;H01J37/22;H01J37/26;H01J49/44;H01L27/146;H01L27/148;H04N5/341;H04N5/369 主分类号 G01N23/04
代理机构 代理人
主权项
地址
您可能感兴趣的专利