发明名称 |
High-resolution gas gauge proximity sensor |
摘要 |
An apparatus and method for precisely detecting very small distances between a measurement probe and a surface, and more particularly to a proximity sensor using a constant gas flow and sensing a mass flow rate within a pneumatic bridge to detect very small distances. Within the apparatus the use of a flow restrictor and/or snubber made of porous material and/or a mass flow rate controller enables detection of very small distances in the nanometer to sub-nanometer range. A further embodiment wherein a measurement channel of a proximity sensor is connected to multiple measurement branches.
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申请公布号 |
US2005268698(A1) |
申请公布日期 |
2005.12.08 |
申请号 |
US20050198278 |
申请日期 |
2005.08.08 |
申请人 |
ASML HOLDING N.V. |
发明人 |
GAJDECZKO BOGUSLAW F.;BOGURSKY KENNETH M.;GALBURT DANIEL N.;SANDER WILLY M.;VIOLETTE KEVIN J. |
分类号 |
G01F1/00;G01B13/12;G03F7/20;G05D7/01;H01L21/027;(IPC1-7):G01F23/00 |
主分类号 |
G01F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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