发明名称 STRUCTURE, SEMICONDUCTOR ALIGNER AND DEVICE MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a vibration damping means securing rigidity with respect to a structure having a lightened construction without complicating design, and imposing no limitation on size, a frequency band and vibration damping. <P>SOLUTION: Components of the structure are subject to lightening, and actuators 3 to 14 for suppressing elastic vibration are arranged on wall faces of lightened parts or a rib structure part 2 existing in a lightened space and are controlled so as to suppress elastic vibration. The actuators 3 to 14 are piezoelectric elements. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005337320(A) 申请公布日期 2005.12.08
申请号 JP20040154523 申请日期 2004.05.25
申请人 CANON INC 发明人 ISOBE YASUSHI;ITO HIROHITO
分类号 B23Q1/01;F16F15/02;H01L21/027 主分类号 B23Q1/01
代理机构 代理人
主权项
地址