摘要 |
PROBLEM TO BE SOLVED: To provide a piezo-electric oscillating piece which can be miniaturized without deteriorating oscillation characteristics by suppressing a CI value, and to provide a piezo-electric device which utilizes such a piezo-electric oscillating piece. SOLUTION: The piezo-electric oscillating piece includes a base 51 formed of a piezo-electric material, a plurality of vibrating arms 35, 36 extended in parallel with each other and long grooves 33, 34 formed along the longitudinal direction of each oscillating arm formed integrally with the base, and the electrode for excitation formed in the long groove. Each oscillating arm has highest rigidity, even at the base side, and the rigidity is gradually lowered toward the tip side. COPYRIGHT: (C)2006,JPO&NCIPI
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