| 摘要 |
PROBLEM TO BE SOLVED: To provide a flaw inspection device of foreign matter or the like capable of separating a flaw such as foreign matter or the like becoming actual harm from the edge roughness or the like of wiring being a non-flaw to detect the same, and a flaw detection method. SOLUTION: The flaw inspection device is constituted by providing beam expanders 201 and 202 for expanding the beam diameter of the coherent laser beam emitted from a laser beam source 100, an optical member group 203 constituted by stacking a plurality of plate-shaped optical members, which are mutually changed in light path length at least in a condensing direction, receiving the laser beam expanded in its beam diameter by the beam expanders to emit a plurality of fine strip-like beams spatially reduced in coherency mutually at least in the condensing direction and a condensing optical system 204 for condensing a plurality of the fine strip-like beams, which are emitted while spatially reduced in coherency mutually from a lens group, in the condensing direction to irradiate the surface of a substrate to be inspected as slit like luminous flux from an inclined direction, as an irradiation optical system 1,000 having the laser beam source 100. COPYRIGHT: (C)2006,JPO&NCIPI
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