发明名称 WORKING METHOD OF ELECTRODE FORMED SO AS TO BE PLATE TYPE OBJECT
摘要 PROBLEM TO BE SOLVED: To provide the working method of an electrode formed so as to be a plate type object capable of preventing the generation of burs and the stagnation of cutting waste between electrodes. SOLUTION: The working method of a plurality of electrodes formed so as to be projected from the surface of the plate type object comprises a resin layer coating process for applying a resin layer on the surface of the plate type object by a resin soluble by a solvent, a cutting process for cutting a plurality of electrodes formed so as to be projected from the surface of the plate type object coated by a resin layer together with the resin layer to align the heights of the electrodes, and a resin layer removing process for resolving and removing the resin layer applied on the surface of the plate type object after finishing the cutting process, by a solvent. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005340593(A) 申请公布日期 2005.12.08
申请号 JP20040159016 申请日期 2004.05.28
申请人 DISCO ABRASIVE SYST LTD 发明人 TSURUSHIMA KUNIAKI;KIMURA YUSUKE
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址