发明名称 Method and process intermediate for electrostatic discharge protection in flat panel imaging detectors
摘要 Shorting bars are provided for electrostatic discharge protection as a portion of trace deposition in a photodiode array. During normal processing for etching of the metal layers, the shorting bars are removed without additional processing requirements. Additional shorting elements are provided by employing FET silicon layers having traces in contact with the array traces to provide extended ESD protection until removal of those shorting elements during normal processing for opening vias for photodiode bottom contact.
申请公布号 US2005272240(A1) 申请公布日期 2005.12.08
申请号 US20040859678 申请日期 2004.06.02
申请人 HUANG ZHONG S 发明人 HUANG ZHONG S.
分类号 H01L21/84;H01L27/12;H01L27/146;H01L29/04;(IPC1-7):H01L29/04 主分类号 H01L21/84
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