| 摘要 |
PROBLEM TO BE SOLVED: To efficiently reduce radiation heat of a vacuum pump transmitted to a vacuum device side with a simple constitution. SOLUTION: A radiation heat reduction structure for reducing influence of radiation heat received by a vacuum chamber 30 is provided in an upstream of a gas transferring mechanism of a turbo-molecular pump 1. The radiation reduction structure is constituted by a heat-shielding mechanism and a cooling mechanism. The heat-shielding mechanism is constituted by a heat-shielding plate 18, a support part 19 and the uppermost spacer 17a. A surface treatment having a radiation ratio of 0.8 or higher is applied to a surface in the downstream side of the heat-shielding plate 18, whereas, surface treatment having a radiation ratio of 0.1 or lower is applied to a surface in the upstream side. Thereby, not only much heat can be absorbed in the heat-shielding plate 18 but also an amount of heat radiated to the vacuum chamber 30 side can be reduced. COPYRIGHT: (C)2006,JPO&NCIPI
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