| 摘要 |
The present invention provides an inspection apparatus and an inspection method capable of inspecting at a high speed by using a sensor having flexibility and excellent productivity. When a circuit board 100 as a subject of inspection is selected, CAD data of the circuit wiring 101 on this circuit board 100 is analyzed to detect the position of the end of each wiring. Then, two or more sensor elements adjacent to the end (from which the voltage variation can be detected) are specified. The switching circuit 16 is controlled to connect the selected sensor elements to an output terminal 12 and to connect the remaining sensor elements to the GND terminal 15. In this state, when an voltage is applied to one of the selected circuit wirings and then an inspection signal (voltage variation) is output from the output terminal 12, it will be determined that no disconnection exists in the circuit wiring.
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