METHOD FOR MEASURING CHARACTERISTICS OF HIGH-FREQUENCY CIRCUIT, PATTERN FOR CALIBRATION, AND FIXTURE FOR CALIBRATION

摘要

PROBLEM TO BE SOLVED: To provide a method for measuring the characteristics of high-frequency circuits in such a way that RF signals may not be affected by measured values. SOLUTION: Prior to the measurement of the characteristics of high-frequency circuits with probe heads 30 and 32 for RF measurement, the probe heads 30 and 32 for RF measurement are calibrated through the use of an extended line 14 for signals arranged on a dielectric substrate 12 and having one characteristic impedance; a first GND pad 16 having one end arranged in the vicinity of a first end part 14a of the line 14 for signals at a prescribed interval; a second GND pad 24 having one end arranged in the vicinity of a second end part of the line for signals at a prescribed interval; and a calibration pattern 10 provided with a through hole electrode 18, a via hole 20, and a back metal layer 22 as conductors for connecting the first GND pad 16 to the second GND pad 24. COPYRIGHT: (C)2006,JPO&NCIPI