摘要 |
PROBLEM TO BE SOLVED: To provide a means for suppressing a defect such as chipping in the grooving and cutting of a highly brittle material. SOLUTION: A manufacturing method is characterized as follows: surface roughening 1b is pre-applied to a prescribed place and a range 2a on a necessary surface of a workpiece 1a by proper means for grinding, blasting, chemical etching, etc.; and grooving or cutting is applied within a range 3b. The surface roughening 1b is set at 10-2,500 nanometers on the basis of an Ra value. The range 2a is set larger than the range 3b by 10-500 micrometers. That is to say, 3c is set at one-half of 10-500 micrometers. COPYRIGHT: (C)2006,JPO&NCIPI |