发明名称 MOLDING METHOD FOR HIGHLY BRITTLE MATERIAL
摘要 PROBLEM TO BE SOLVED: To provide a means for suppressing a defect such as chipping in the grooving and cutting of a highly brittle material. SOLUTION: A manufacturing method is characterized as follows: surface roughening 1b is pre-applied to a prescribed place and a range 2a on a necessary surface of a workpiece 1a by proper means for grinding, blasting, chemical etching, etc.; and grooving or cutting is applied within a range 3b. The surface roughening 1b is set at 10-2,500 nanometers on the basis of an Ra value. The range 2a is set larger than the range 3b by 10-500 micrometers. That is to say, 3c is set at one-half of 10-500 micrometers. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005329692(A) 申请公布日期 2005.12.02
申请号 JP20040177634 申请日期 2004.05.19
申请人 NANOTEMU:KK 发明人 IKEDA NATSUKO;KANEKO YOSHIE;KAMIDAN KAZUKI;TAKATSU MASAKAZU;TAKADA ATSUSHI;KONDA TAKASHI
分类号 B24C1/04;B24B27/06;B28D5/00;H01L21/301;(IPC1-7):B28D5/00 主分类号 B24C1/04
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