摘要 |
<P>PROBLEM TO BE SOLVED: To exactly and highly accurately hold a spherical tool and to position the tool highly accurately and efficiently. <P>SOLUTION: This device is provided with the spherical tool 3 for machining a recessed spherical surface of a workpiece 2; a horn 5 having a recessed holding part 4 to rollingly hold the tool 3 at an end and ultrasonically vibrating the tool 3; a mount for fixing the workpiece 2 at a position facing to the tool 3; a pressurizing means for making the tool 3 and the workpiece 2 abut on each other by prescribed pressure; a measuring means for measuring relative displacement amount of the mount and the tool 3; and a machining fluid supply means for supplying machining fluid dispersed with abrasive grain to a boundary face of the workpiece 2 and the tool 3. The horn 5 is formed into a tapered shape in which the external shape is gradually thinned toward the tool 3. The holding part 4 is formed by being recessed into a cylindrical shape or a conical shape to hold the tool 3 at the inside and is provided with a guide hole 16 to position the tool 3 at the inside. <P>COPYRIGHT: (C)2006,JPO&NCIPI |