摘要 |
<P>PROBLEM TO BE SOLVED: To inexpensively provide a silicon nitride ceramic having excellent mechanical properties and heat conductivity and a manufacturing method therefor. <P>SOLUTION: The silicon nitride ceramic is obtained by mixing silicon nitride powder with a sintering aid and sintering the mixture. The manufacturing method therefor comprises: a step (1) where a sintering aid such as a rare earth compound is added to silicon nitride powder to prepare raw material powder; a step (2) where raw material powder obtained in the step (1) is sintered at 1,400 to 1,800°C using an arc plasma sintering apparatus to prepare dense particulate ceramics; and a step (3) where the particulate ceramics obtained in the step (2) is heat-treated at 1,600 to 2,000°C. <P>COPYRIGHT: (C)2006,JPO&NCIPI |