| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow cell type QCM sensor formed into a structure capable of suppressing the mechanical stress of a vibrator and enhanced in mechanical strength, frequency and chemical resistance. SOLUTION: A quartz vibrator is formed into the integrated cell structure of a vibrator part and a flow channel part by boring both sides of a substrate and forming the flow channel part to one bored part to form one of a pair of electrodes to the base of the flow channel part while forming the other one of a pair of the electrodes to the other bored part. The quartz vibrator includes a structure wherein an electrode is formed on the side opposite to the flow channel part without providing the bored part and a structure wherein the flow channel part is formed by a substrate having the same material as the vibrator part to bond the vibrator part and the flow channel part. The assembly structure of the sensor is set to a laminated structure for guiding respective constitutent members such as a holding substrate, a vibrator substrate, a sample injection/discharge block or the like only by a guide pin and utilizing the gravity of the constitutent members or a laminated structure utilizing a pressure block. COPYRIGHT: (C)2006,JPO&NCIPI
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