| 摘要 |
PROBLEM TO BE SOLVED: To obtain film deposition having high directivity regarding a film deposition source, a vacuum film deposition system, a method for producing an organic EL (Electro Luminescent) device, and an organic EL device. SOLUTION: The film deposition source 10 in a vacuum film deposition system is provided with: a material storage part 11 for storing a film deposition material; a heating means 12 for heating the film deposition material in the material storage part 11; and a straightening part 13 provided on the exhaust nozzle 11a of the material storage part. The straightening part 13 has flow passages 13b partitioned by fine openings 13a, and based on the cross-sectional area Sa of each opening 13a in the straightening part 13, the distance L from the injection edge of the straightening part 13 to the face to be film-deposited, and the film deposition rate R of the film deposition material in the face to be film-deposited directly above the center of the straightening part 13, set high directivity is obtained. COPYRIGHT: (C)2006,JPO&NCIPI
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