| 摘要 |
PROBLEM TO BE SOLVED: To provide an imaging module which can reduce the influence of a noise to an imaging element, and to provide an electrostatic shutter device. SOLUTION: The electrostatic shutter device includes a first fixing member (1b) having a first driving electrode (4b) on a front surface, a first moving member (24b) having a light shielding property movable upon reception of a drive force by the charge of the first drive electrode, a protective member (25) disposed to hold the first moving member by the first fixing member, a second fixing member (1a) disposed on the rear surface side of the first fixing member opposed to the first moving member and having a plurality of second drive electrodes (4a) on the front surface, and a second moving member (24a) disposed to be sandwiched between the first fixing member and the second fixing member and having light shielding property movable upon reception of the driving force by the charge of the second driving electrode. In the electrostatic shutter device, the shielding electrode (4c) is disposed on the rear surface side of the second driving electrode opposed to the second moving member. COPYRIGHT: (C)2006,JPO&NCIPI |
