WAFER CASSETTE POSITION ADJUSTING APPARATUS OF SEMICONDUCTOR MANUFACTURING EQUIPMENT AND ITS METHOD

摘要

PROBLEM TO BE SOLVED: To provide a wafer cassette position adjusting apparatus adjusting the position of a cassette provided with wafer at the time of the loading of the wafer cassette on a cassette support member. SOLUTION: A wafer cassette position adjusting apparatus of a semiconductor manufacturing equipment comprises: a controller for sensing the loading state of a wafer cassette 20 and generating and outputting a motor driving signal for transferring the wafer cassette 20 to a specified position; and a cassette position transfer unit for transferring the wafer cassette 20 to the specified position by the motor driving signal output from the controller. COPYRIGHT: (C)2006,JPO&NCIPI