| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic shutter device in which a plurality of actuators can efficiently be positioned when assembled, and to provide an assembly method therefor. SOLUTION: In the assembly method for the electrostatic shutter device comprising two electrostatic actuator mechanisms stacked one on another, each electrostatic actuator mechanism being designed such that a moving member is moved relative to a stator by electrostatic force, positioning electrodes (41a and 41b) are disposed on the opposite faces of the stators (1a and 1b, respectively). Electrostatic capacity between the two positioning electrodes is detected. In accordance with the electrostatic capacity detected, a relative positional relation between the stators is determined. COPYRIGHT: (C)2006,JPO&NCIPI
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