| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a device having an optical waveguide structure with little optical transmission loss that enables an optical waveguide to be efficiently manufactured on a substrate. SOLUTION: The method for manufacturing a device having, on a substrate, an optical waveguide structure which is composed of a core part transmitting light and a clad part comprising an upper and a lower clad part and surrounding the core part, is characterized in that it includes an unhardened lower clad part forming process in which an unhardened film for the lower clad part is press-fixed onto the substrate; a lower clad part forming process in which the lower clad part is obtained by hardening the unhardened film for the lower clad part; a core part forming process in which the core part is formed; and an upper clad part forming process in which the upper clad part is formed. COPYRIGHT: (C)2006,JPO&NCIPI |
