A releasable anode liner that is fitted within the interior of the anode of an ion source. The cover permit; electrons to be projected into the anode wherein any insulating deposits adhere to the interior of the anode liner, thereby increasing the effective life of the anode without premature replacement or repair.
申请公布号
WO2005114701(A2)
申请公布日期
2005.12.01
申请号
WO2005US17340
申请日期
2005.05.18
申请人
INFICON, INC.;ELLEFSON, ROBERT, E.;FREES, LOUIS, C.