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发明名称
METHOD FOR FABRICATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100533978(B1)
申请公布日期
2005.11.30
申请号
KR20040050189
申请日期
2004.06.30
申请人
HYNIX SEMICONDUCTOR INC.
发明人
ROH, JAI SUN
分类号
H01L21/8242;H01L21/02;H01L21/3105;H01L21/768;(IPC1-7):H01L21/824
主分类号
H01L21/8242
代理机构
代理人
主权项
地址
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