| 摘要 |
The (meth)acrylate of the present invention is represented by the following formula (1). The (meth)acrylate can be produced by first producing a lactone by reducing an addition product obtained by the Diels-Alder reaction between 1,3-diene and maleic anhydride, and then hydrating the lactone to produce an alcohol followed by (meth)acrylation of the alcohol. A polymer produced by (co)polymerizing a monomer composition comprising the (meth)acrylate of the present invention is excellent in transparency, dry etching resistance, and solubility in organic solvents, and so it is preferably used as a resin for a chemically amplified resist composition. <CHEM> wherein each of R<1>, R<2>, R<3> and R<4> represents a hydrogen atom, a methyl group or an ethyl group; either one of x<1> or x<2> represents a (meth)acryloyloxy group and the other represents a hydrogen atom; both A<1> and A<2> represent hydrogen atoms, or A<1> and A<2> form -O-, -CH2- or -CH2CH2-. |
