A low-loss conductive pattern on a substrate and a method for fabrication thereof

摘要

In the present invention a low-loss conductive pattern, like e.g. a spiral inductor or an interconnect line is disclosed and a method of fabricating such a conductive pattern. To overcome the problem of the strong (even resonance) frequency dependence of the main parameters of a conductive pattern, like e.g. interconnects lines and spiral inductors, on a lossy substrate in a predetermined frequency region, a semi-transparent screening layer and an electrical contact for applying a substantially zero potential to said layer are introduced in or on said lossy substrate.