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发明名称
Thin film deposition apparatus having more than one rotatable gas injector and thin film deposition method using the same
摘要
申请公布号
KR100531555(B1)
申请公布日期
2005.11.28
申请号
KR20020060145
申请日期
2002.10.02
申请人
发明人
分类号
H01L21/20;(IPC1-7):H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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