| 摘要 |
PROBLEM TO BE SOLVED: To provide a vaporizer for MOCVD, adapted to produce vaporized gas containing uniformly dispersing ingredient solution, and to provide a method of vaporizing the ingredient solution. SOLUTION: The vaporizer for MOCVD comprises (1) a distributor section 8, having a gas inlet 4 for introducing a pressurized carrier gas 3 into gas passage, a means for supplying ingredient solution 5a to the gas passage, and a gas outlet 7 for delivering the ingredient-solution-containing carrier gas to a vaporizer section 22; (2) the vaporizer section 22, having vaporizing pipe 20 with one end connected to a reaction pipe of an MOCVD apparatus and the other connected to the gas outlet 7, and a heating means for heating the vaporizing pipe 20, wherein the vaporizer section 22 is adapted to heat the ingredient-solution-containing carrier gas delivered from the distributor section 8 to vaporize it, (3) wherein the distributor section 8 has a dispersing body 1, including a cylindrical hollow member and a rod 10 having an outside diameter smaller than the inside diameter of the cylindrical hollow member, the rod 10 having a spiral groove 60 on the outer periphery on the vaporizer-section 22 side, and the rod 10 is inserted into the cylindrical hollow member. COPYRIGHT: (C)2006,JPO&NCIPI
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