| 摘要 |
PROBLEM TO BE SOLVED: To enhance the reliability for joining performance between a passage plate made of glass and a piezoelectric plate or a piezoelectric substrate, and the manufacture yield. SOLUTION: The manufacturing method comprises the steps consisting of a step of fabricating an ink passage plate 33 having two or more ink-passage grooves 37 with glass, a step of applying an adhesion layer 34 of photosensitive composition on the top surface of the piezoelectric plate 32, a step of making the undersurface of the ink passage plate 33 bonded by thermocompression to the adhesion layer 34 at a first thermocompression process, a step of, thereafter, making the adhesion layer 34 exposed and hardened in a light-exposure process through the ink passage plate 33 and a step of making the adhesion layer 34 hardened completely in a second thermocompression process whose operation temperature is higher than the one in the first process. COPYRIGHT: (C)2006,JPO&NCIPI
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