发明名称 High performance FET with elevated source/drain region
摘要 A field effect transistor (FET), integrated circuit (IC) chip including the FETs and a method of forming the FETs. The FETs include a thin channel with raised source/drain (RSD) regions at each end on an insulator layer, e.g., on an ultra-thin silicon on insulator (SOI) chip. Isolation trenches at each end of the FETs, i.e., at the end of the RSD regions, isolate and define FET islands. Insulating sidewalls at each RSD region sandwich the FET gate between the RSD regions. The gate dielectric may be a high K dielectric. Salicide on the RSD regions and, optionally, on the gates reduce device resistances.
申请公布号 US2005260801(A1) 申请公布日期 2005.11.24
申请号 US20040996866 申请日期 2004.11.24
申请人 DIVAKARUNI RAMA;HSU LOUIS C;JOSHI RAJIV V;RADENS CARL J 发明人 DIVAKARUNI RAMA;HSU LOUIS C.;JOSHI RAJIV V.;RADENS CARL J.
分类号 H01L21/336;H01L29/45;H01L29/76;H01L29/786;(IPC1-7):H01L21/336 主分类号 H01L21/336
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