CALIBRATION GAS GENERATION QUANTITY MEASURING SYSTEM

摘要

PROBLEM TO BE SOLVED: To solve the problem in a conventional calibration gas generation quantity measuring system that the weight of a calibration gas generation tube cannot be continuously and easily measured or recorded without being taken out of a thermostat bath. SOLUTION: The system for continuously generating a calibration gas while keeping a calibration gas generation tube in a constant temperature state and measuring the quantity of the generated calibration gas comprises a holder on which the calibration gas generation tube is arranged in a sealed state; a thermostat bath in which the holder is arranged; a flow rate adjuster; a weight meter; and a terminal device connected to the weight meter. The weight meter is connected to the calibration gas generation tube through a connecting member, and the calibration gas generation tube is set in the holder so as to be floated. A fixed quantity of diluted gas is blown into the holder by the flow rate adjuster, and the weight of the calibration gas generation tube is continuously measured. The measured value is recorded in the terminal device, and the generation quantity of the calibration gas based on the measured value is measured by the terminal device. According to this, the weight of the calibration gas generation tube can be continuously and easily measured or recorded without being taken out of the thermostat bath. COPYRIGHT: (C)2006,JPO&NCIPI