| 摘要 |
PROBLEM TO BE SOLVED: To provide an analysis sample preparing apparatus capable of simply reducing silicon fluoride in an analysis sample when the analysis sample for analyzing metal impurities present in a semiconductor sample such as a silicon wafer or the like is prepared and capable of stably preparing the analysis sample suitable for analyzing metal impurities, and an analysis sample preparing method. SOLUTION: The analysis sample preparing apparatus is constituted so as to prepare the analysis sample by decomposing the semiconductor sample and equipped with at least a hermetically closed container for receiving the semiconductor sample to decompose the same, a boat on which the semiconductor sample installed in the hermetically closed container is placed, a gas introducing pipe for introducing a decomposing gas for decomposing the semiconductor sample into the hermetically closed container, a pressure regulating valve for regulating the pressure of the decomposing gas introduced into the hermetically closed container, an exhaust means for evacuating the hermetically closed container to reduce the pressure in the container and a heating means for heating the semiconductor sample in the hermetically closed container. An analysis sample evaluating method is also disclosed. COPYRIGHT: (C)2006,JPO&NCIPI
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