Verfahren zum Erzeugen einer Schutzabdeckung für ein Bauelement

摘要

Sacrificial structure (108) is produced on the substrate (100). A first section (110) of the sacrificial structure covers a first region (104) of the substrate which includes the component. A second section (112) extends from the first region into a second region (106) of the substrate without components. A first covering layer (114) is deposited, to surround the sacrificial structure, such that the second section (112) is left bare. The sacrificial layer is removed. The structure formed by removing the sacrificial layer is sealed.