| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a MEMS sensor and the measuring method of the movement of a middle material and to provide a forming method of the MEMS sensor. <P>SOLUTION: The sensor comprises a substrate, a lower magnetic material arranged on the substrate, a layer arranged on an upper part of the substrate, an upper magnetic material arranged at a whole surface of a layer which counters the lower magnetic material part, a middle magnetic material which is magnetically levitated between the lower magnetic material and the upper magnetic material, and a component which measures any of a movement, a displacement and a force applied to the middle magnetic material part. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
