| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration sensor capable of preventing sensitivity for detecting vibration from being lowered, and having improved shock resistance. SOLUTION: This vibration sensor is equipped with a fixed electrode 4, and a diaphragm 3 wherein the surface facing to the fixed electrode 4 functions as a vibrating electrode and a weight 1 is provided on the surface on the opposite side of the vibrating electrode. In the sensor, the weight 1 is displaced in the direction orthogonal to the surface of the diaphragm 3, and a vibration detection signal is outputted based on the change of a capacitance between the fixed electrode 4 and the diaphragm 3. The weight 1 is formed circularly, and the sensor is also equipped with a regulation member 2 in contact with the weight 1, for regulating displacement of the weight 1. COPYRIGHT: (C)2006,JPO&NCIPI
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