METHOD FOR TESTING A CAPACITIVE ACTUATOR,申请号EP20010944976-传众专利搜索

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发明名称	METHOD FOR TESTING A CAPACITIVE ACTUATOR
摘要
申请公布号	EP1287250(B1)	申请公布日期	2005.11.23
申请号	EP20010944976	申请日期	2001.06.07
申请人	SIEMENS AKTIENGESELLSCHAFT	发明人	HIRN, RAINER;KAESBAUER, MICHAEL
分类号	F02D41/20;F02D41/22;H02N2/06;(IPC1-7):F02D41/20;H01L41/04	主分类号	F02D41/20
代理机构		代理人
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