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发明名称
Substrate transfer device
摘要
申请公布号
GB2382924(B)
申请公布日期
2005.11.23
申请号
GB20020020093
申请日期
2002.08.29
申请人
* SUMITOMO HEAVY INDUSTRIES, LTD.
发明人
HIDEHIKO * MORI;YOSHIYUKI * TOMITA;KAZUTOSHI * SAKAKI
分类号
G12B5/00;B65G49/07;F15B15/14;H01L21/027;H01L21/677;H01L21/68;(IPC1-7):H01L21/00;H01J37/20;H01J37/317
主分类号
G12B5/00
代理机构
代理人
主权项
地址
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