发明名称 |
Semiconductor manufacturing/testing ceramic heater, production method for the ceramic heater and production system for the ceramic heater |
摘要 |
A process for producing a ceramic heater includes forming a resistance heating element on a surface of a ceramic substrate. The resistance heating element is divided into plural sections. Resistivities of the plural sections are measured, respectively. Each of the plural sections is trimmed according to a comparison between the resistivities of the plural sections.
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申请公布号 |
US6967312(B2) |
申请公布日期 |
2005.11.22 |
申请号 |
US20020070443 |
申请日期 |
2002.06.24 |
申请人 |
IBIDEN CO., LTD. |
发明人 |
HIRAMATSU YASUIJI;ITO YASUTAKA;KARIYA SATORU |
分类号 |
H01L21/00;H01L21/683;(IPC1-7):H05B3/68 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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