| 摘要 |
A first flow passage (16) for cooling, by circulating first cooling water (15), an object of which temperature is to be regulated and a second flow passage (19) that is different from the first flow passage are provided. Heat exchange is performed between second cooling water (18) flowing in the second flow passage (19) and the first cooling water (15). There is no need to store the first cooling water (15) in a tank with fixed capacity. Further, substantially the entire heat of the first cooling water (15) flowing in a chiller- equivalent portion of the first flow passage (16) is absorbed by the second cooling water (18). The structure above quickens response to load variation of an object of which temperature is to be regulated and can reduce the waste of energy while improving temperature control accuracy.
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