发明名称 SEMICONDUCTOR LASER AND MANUFACTURING METHOD THEREOF
摘要 <P>PROBLEM TO BE SOLVED: To provide stably a semiconductor laser with excellent quality. <P>SOLUTION: There is provided the semiconductor laser provided with an n-InP substrate 1; a multilayer film provided on the n-InP substrate 1 and including a distortion MQW active layer 6; a p side electrode 18 arranged on the multilayer film; a pair of grooves 15 located at both sides of the p side electrode 18, for separating the multilayer film and reaching the n-InP substrate 1; and a plurality of diffraction gratings provided to a region from the one of a pair of the grooves 15 over the other on a diffraction grating forming face located on an upper side of the n-InP substrate 1, or an upper side of any semiconductor film included in the multilayer film. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005322849(A) 申请公布日期 2005.11.17
申请号 JP20040141386 申请日期 2004.05.11
申请人 NEC COMPOUND SEMICONDUCTOR DEVICES LTD 发明人 OKUDA TETSURO
分类号 G02B5/18;G03F7/20;H01S3/08;H01S5/00;H01S5/042;H01S5/12;H01S5/22;H01S5/227;H01S5/323;H01S5/343 主分类号 G02B5/18
代理机构 代理人
主权项
地址